USPTO Patents Application 09932580

Docket Number: 5589-04400

DECLARATION

As a below named inventor, I hereby declare that:
y residence, post office address, and citizenship are as stated below next to my name.

[ believe I am an original, first and joint inventor of the subject matter which is claimed and for which a
sought on the invention entitled "METHOD OF INTERFACING ANCILLARY EQUIPMENT TO FIMS
ROCESSING STATIONS," the specification of which:

□ is attached hereto.

was filed on August 17, 2001 as Application Serial No. 09/932,580
and was amended on (if applicable).

I hereby state that I have reviewed and understand the contents of the above-identified specification,
including the claims, as amended by any amendment referred to above.

I acknowledge the duty to disclose to the Patent and Trademark Office all information known to me to be
material to patentability of the subject matter claimed in this application, as "materiality" is defined in 37 C.F.R. §
1.56.

I hereby claim foreign priority benefits under 35 U.S.C. § 119(a)-(d) or § 365(b) of any foreign
application(s) for patent or inventor's certificate listed below, or under § 365(a) of any PCT international application
listed below designating least one country other than the United States of America, and have identified below any
foreign application for patent or inventor's certificate, or of any PCT international application, having a filing date
before that of the application on which priority is claimed.

Prior Foreign Application No. Country Filing Date Priority Cert, copy

fmm/dd/yy) Claimed Attached

N/A

I hereby claim the benefit under 35 U.S.C. § 119(e) of any United States provisional application(s) listed

below.

Provisional Application No. Filing Date

(mm/dd/yy)

60/226,336 08/18/2000

I hereby claim the benefit under 35 U.S.C. § 120 of any United States application(s) listed below, or under
§ 365(c) of any PCT international application listed below designating the United States of America, and, insofar as
the subject matter of each of the claims of this application is not disclosed in the prior United States or PCT
international application in the manner provided by the first paragraph of 35 U.S.C. § 1 12, 1 acknowledge the duty to
disclose all information known to me to be material to the patentability of the subject matter claimed in this
application, as "materiality" is defined in 37 C.F.R. § 1.56, which became available between the filing date of the
prior application and the national or PCT international filing date of this application.

Parent Application No. Filing Date Parent Patent No. (if applicable) or Status

(mm/dd/yy)

N/A

Page 1 of 2

%

. Please direct all communications to:

Ann Marie Mewherter
Conley, Rose & Tayon, P.C.

P.O. Box 398
Austin, Texas 78767-0398
Phone: (512)476-1400

I hereby declare that all statements made herein of my own knowledge are true and that all statements made
herein on information and belief are believed to be true; and further that these statements were made with the
knowledge that willful false statements and the like so made are punishable by fine or imprisonment, or both, under
18 U.S.C. § 1001 and that such willful false statements may jeopardize the validity of the application or any patent
issued thereon.

Docket No. 5589-04400

Inventor's Full Name:
Inventor's Signature:

City and State (or Foreign CountryVoj Residence:
Post Office and Residence Address:

Scott Ashkena^z

Palo Alto, CA

Date: /jMq^
Citizenship: USA

2135 Columbia St., Palo Alto, CA 94306

(Include number, street name, city, state and zip code)

As an above named inventor, I have signed this declaration on my own behalf. Under 37 C.F.R. § 1.47(a),
I also sign this declaration on behalf of the non-signing joint inventor, C. Thomas Larson, who refuses to sign.

Last known address of non-signing joint inventor, C. Thomas Larson: 1096 Jessica Dr., Livermore, CA
94550, his country of citizenship is U.S.A.

Accompanying this declaration are: (1) Statement of Facts in Support of Filing on Behalf of Non-Signing
Inventor; and (2) Petition 37 C.F.R. §§ 1.47(a) and L17(i).with required fee.

By:

Scott Ashkena^fc #

(signing on behan of O/Thomas Larson)

Page 2 of 2

1-31-92

To the Honorable (

Jfi-C-

RECORDATION FORM COVER SHEET
PATENTS ONLY

aoner of PaA&gand Trademarks. Please record the attached original documents or copy

thereof.

US. DEPARTMENT OF COMMERCE .
Patent and Trademark Office ;

Atty. DkL No. 5589-04400

1. Name of conveying pa

-Scott Ashkenaz

Additional name(s) of conveying party(ies) attached? □ Yes BNo

3. Nature of Conveyance:

^ Assignment □ Merger

□ Security Agreement □ Change of Name

□ Other.

Execution Date:

March 16, 2002

2. Name and address of receiving party(ies):

Name: KLA-Tencor Technol ogies Corporation

Internal Address: ■

Street Address:

160 RioRobles

aty: SanTose State CA

7TP

9513y

Additional name(s) & address(es) attached? □ Yes H No

4. Application niirhber(s) or patent numbers):

If this document is being filed together with a new application, the execution date of this application is:

A. Patent AppHcatfon No,s) SN 09/932,580 filed 8/17/01 ^/^^HVes H No

5. Name and address of party to whom correspondence
concerning document should be mailed:

Name:

Ann Marie Mewherter

Internal Address: Conlev, H ose & Tavon, P.C
Street Address: P.O. Box 398

City Austin State TX zip 78767-0398

6. Total number of applications and patents involved: one (1)

7. Total fee^^^R3.41):
□ ^closed

40.00

r ^jumorized to be charged to deposit account

1

8, Del^&ount number 50-1505/5589-04400
(Afec^Ptqjlicate copy of this page if paying by deposit account)

I

DO NOT USE THIS SPACE

9. Statement and Signature.

To the best of my knowledge and belief, the foregoing information is rrue^dcon^n^amched copy is a true copy oftheorigmal document

Ann Marie Mewherter

Name of Person Signing
Reg. No. 50,484

March 19, 2002

Signature

Date

Total number of pages comprising cover sheet

OMB No. 0651-011 (exp.4/94)